Mechatronic Handling Device Based on the Piezo Ceramic Structures for Micro and Nano Applications

This paper presents actually work from development of mechatronic handling devices able to accomplish certain microand/or nano operation tasks. Piezo ceramic structures with (3,1)-piezoelectric effect integrated into the mechatronic system will be used an actuation element. The subject of this paper is structures with more than 1 degrees of freedom appropriate for different microand nano-applications.The kinematic design of the actuator involves specifying the kinematic structure and required raw geometric data like actuator force and motion. Here the synthesized kinematic structures using the structured piezo ceramics are tense integrity closed structures. A fine tuning of geometric and material parameters is performed in an iterative process based on a lot of partial tasks to be achieved, with respect to: modeling, FE-simulation, design, control and experimental investigation of mechatronic handling device for microand nano-operations.